Fig. 2
From: Optically transparent vertical silicon nanowire arrays for live-cell imaging
SiNW fabrication and their subsequent transfer onto an optically transparent substrate. a, b SEM images of the negatively tapered SiNW arrays fabricated via e-beam lithography and DRIE, (a) the zoom-out, and (b) the zoom-in. c, d Optical and SEM showing the Si donor substrate post-harvest. e–g Optical image showing SiNW transfer onto a glass substrate (e); and tilt SEM images of a zoom-out and zoom-in of the transferred SiNW array onto the glass substrate