Figure 1
From: Porous Organic Nanolayers for Coating of Solid-state Devices
Schematic illustration of the vapor-phase nanocoating deposition vacuum chamber and monomers (not to scale). Monomer A and B depict APTMS and PFTS chemicals placed on two glass slides. The silicon chip to be coated is on middle glass slide. The two monomers react in the vapor-phase and form a gaseous combination above the plain Si chip in vacuum.