Coated 3D Solid-state micropore. The 3D structure of the micropore of radius 11.7 with a nanocoating produced by 2.5:1 ratio of APTMS and PFTS at a vacuum of 22 mmHg for 40 mins deposition. (a) shows the Si substrate with a micropore in it. (b) shows the magnified view of the interconnected coating. (c) Coating on the membrane (darker region) and the inclined wall (bright part). (d) shows the micropore coated with the nanolayer (sample E). (e) and (f) show the periphery of the micropore which shows the inner surface of the pore coated.